Soft X-Rays and Extreme Ultraviolet Radiation
Principles and Applications
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Produkt beskrivelse
This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
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Detaljer
- ISBN13 9781139632621
- Udgivet 2007
- Forlag Cambridge University Press
- Format Elektronisk medie
- Udgave 1
- Sprog Engelsk