Laser Microfabrication: Thin Film Processes and Lithography
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Product description
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
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Details
- ISBN13 9780080918020
- Pages 587
- Released 1989
- Publisher Academic Press
- Format Elektronisk medie
- Language English