Post-Processing Techniques for Integrated MEMS
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Product description
This groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240 illustrations, the book details a modular integration process that won’t modify the electronics fabrication process or impose any limitation for optimizing the physical properties of the MEMS structural layers.
Accessibility information
Details
- ISBN13 9781580539029
- Released 2005
- Publisher Artech House
- Format Elektronisk medie
- Edition 1
- Language English